OBJECTIVE A challenging full-time position in MEMS engineer
EDUCATION PhD, Micro/Nano Fabrication Engineering GPA: 3.9/4
Louisiana Tech University, Ruston, LA 71270 USA 08/2007
MS, Manufacturing Systems Engineering GPA: 3.8/4
Louisiana Tech University, Ruston, LA 71270 USA 11/2003
BS, Aircraft Manufacturing Engineering GPA: 83/100 Northwestern Polytechnical University, Xi’an,China 07/1992
PROFILE • Ten years hands-on experience in mechanical processing
• Nine years thorough hands-on experience in MEMS and
semiconductor processing in class 100 cleanroom
• Two year hands-on experience in design, fabrication and
characterization of medical sensors
• Proficiency in design and multi-physics modeling using FEA
software
• Strong experience in characterization using SEM and AFM
• Experience in a group leadership and management
SKILLS
Microfabrication
• Ample experience in mask design, photolithography,
sacrificial surface MEMS process, dry etching (ICP/RIE), focus
ion beam etching, wafer cleaning, thin film deposition (E-
beam/thermal Evaporation, Sputtering), Rapid thermal oxidation
processing, hot embossing/nano imprinting, soft lithography
• Experience in SEM, AFM, Optical Microscope, Laser Scanning
Confocal Microscope, Roughness-Step Tester, Surface Profiler
Sensor Characterization
Experience in mechanical and electrical characterization of
flexible membrane based pressure sensor for sensitivity,
resolution, noise and response time.
Modeling and Simulation
COMSOL-multiphysics, ANSYS, CoventorWare, L-EDIT, MATLAB,
AutoCAD, Pro/ENGINEER
Mechanical Processing:
CNC Punch Machines, Sheet Metal Unbending, Design of Molds
for Sheet Metal Parts
PROFESSIONAL EXPERIENCE
Postdoctoral Scholar (Medical University of South Carolina,
Charleston SC) 2010 – present
Developing a new implantable blood pressure and oxygen sensor.
A highly sensitive pressure sensors using Au coated PDMS thin
membranes for biomedical application was fabricated and
characterized. In its effective measurement range, the
sensitivity was 0.2/kPa which was much higher than most of the
sensors reported by the other researcher groups. A prototype of
LED-based optical oxygen sensor was also fabricated
successfully with high resolution of 0.25% oxygen change in gas
phase.
Faculty Associate (University of Texas at Arlington, Arlington
TX) 2007 – 2010
• Patterned ‘Au’ on side walls of microchannels with aid of ‘Si’-
reinforced PDMS soft mold through hot-embossing process, to
serve as templates to direct horizontal assembly of nanowires
and nanotubes into planar devices for use of specific
mechanical and electrical properties of these one-dimensional
nano-building blocks.
• Created ‘Ag’ patterns on top and side walls of polystyrene
blocks based on shape-memory effect.
• Developed new approach to create channels with super-
hydrophobic bottom surfaces and super-hydrophobic sidewalls.
• Developed micro-boat driven by isopropyl alcohol for
transporting targets in micro-fluidic systems. Discovered the
driving mechanisms of cm-scaled PDMS boats of respective close
and open reservoirs.
• Discovered the tissue reactions to micropillar implants.
• Discovered the mechanism of the transition from Cassie-Baxter
to Wenzel States of water droplets on microline-formed PDMS
surfaces.
Research Assistant (Louisiana Tech University, Ruston LA)
2003 – 2007
• Developed Intermediate-layer lithography (ILL) method to
fabricate metal or conductive polymer micro/nano pattern with
simplicity, low cost and free of aggressive chemistry.
• Generated conducting polymer-based heterojucntions, diodes and
capacitors using ILL method.
• Patterned biomaterial such as polycaprolactone and glucose
through rigid silicon or SU-8 stencil without deformation
problem.
• Developed method to reinforce Polydimethylsiloxane (PDMS)
masters using oxide-coated silicon plate to reduce residual and
deflecting deformations in soft lithography.
• Developed all-polymeric drug-delivery device through thermal
ablation of PMMA.
• Created cantilever-based mass sensors to determine number of
molecules adsorbed when partially occupied by molecules.
• Formulated wafer-level packaging method conducting polymer
microsystems using SU-8/PDMS composite membranes to lower
processing temperature and manufacturing costs.
• Investigated ultrasonic-assisted buffered oxide etching to have
uniform and smooth micro pattern with high aspect ratio.
• Simulated heat distribution on drug-delivery device, ...
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